Multilayer Piezo Rectangular Actuators/ HMJ200 series( piezo stack actuators in an extensive array of dimensions, stroke

Basics of Stack Actuators

Piezo materials are materials that will generate an electric charge when they are deformed, or conversely, they will deform when electrically charged. The latter is the inverse piezoelectric response and the response responsible for actuation.

An actuator is essentially a motor, or a generator of motion, usually linear and limited in range. A piezo actuator will generate a linear displacement when an electric field is applied, and this displacement is also capable of applying a force, and therefore the actuator is capable of doing work. The amount of force that can be applied depends on the cross sectional area of the actuator.

The amount of movement that a piezo device can yield is equal to the amount of voltage applied times the d33 or the piezo electric coefficient. This piezoelectric coefficient, d33, is a figure of merit for the piezo material relating to the efficiency of the material in transferring the electrical energy to mechanical energy. Please note that this movement does not depend on the dimensions of the piezo element. Therefore, when one stacks piezo elements together, there is a multiplying effect on the amount of movement that is achieved. However, the amount of voltage that can be applied will depend on the material and the thickness of each element. A stack of 2 piezo elements will have twice the movement at the same applied voltage as a single piezo element, and a stack of 3 piezo elements will exhibit 3 times the movement as a single element with the same applied voltage, etc. This is the basis for multilayer actuators.

Multilayer actuators are essentially many stacked layers of piezo material acting in concert. There are low voltage actuators, usually operating at up to 200 volts, and high voltage actuators operating at up to 1000 volts.

Low voltage actuators are co-fired multilayer actuators. These have very thin ceramic layers that are made by casting a ceramic / organic slurry to form a tape, dried, electroded with a thin precious metal electrode, usually a silver palladium electrode, the electrode tape is stacked, laminated, and fired to a dense ceramic / electrode package. The fired package is cut to size exposing the electrodes and the electrical connections are made. The stack is poled by applying a DC field to activate the piezo material and a protective insulating coating is applied.

High voltage actuators are constructed with discrete sintered, poled ceramic disks, rings or plates with thin metal leaf electrodes interlaced between the ceramics. The device is bonded together with a high quality adhesive. These stack actuators are often enclosed in metal casing with an appropriate pre stress applied. Other options for these actuators can be casings specially designed to manage the heat generated during operation, or include the possibility of position sensing for the piezoelectric stack actuator.

Piezo actuator movements will be on the order of a hundred micro meters supporting a load of 7 kN/cm2. Therefore one must be aware of the advantages of piezo actuators to be sure that they are the correct choice for the application compared to conventional motors.

The advantages of piezo motors over conventional motors are: Fast response without delay, Very high acceleration rates, Very high power generation, Compact design, High mechanical power density, Consumes power only when motion is generated, Operates in vacuum and at Cryogenic conditions, have no rotating parts, and are unaffected by magnetic fields.

Care must be taken when mounting piezo actuators that all resulting applied stress on the actuator is axial and is a purely compressive stress. Piezo actuators can be designed with various end pieces to ensure appropriate loading.

Applications for piezo actuators include fiber modulation for communications, precise positioning devices, proportioning valves, electrical switches, micro pumps, ink jet printers, and anti-vibration devices.

HM carries a variety of piezo actuator power supplies / amplifiers to operate our piezo actuators in your electromechanical system.




 Compact size
 Accurate positioning in nm
 High-speed response in ms
 Large blocking force
 High energy conversion efficiency, low power consumption and no electromagnetic noise
 Easy to be controlled by voltage

Scope of applications

 Precision mechanics and mechanical engineering
 Life sciences,Medicine and Biology
 Pneumatic&Hydraulic valves
 Nano positioning/high-speed switching
 Active and Adaptive optics


Part numbering


Multilayer Piezo Rectangular Actuators/ HMJ200 series( piezo stack actuators in an extensive array of dimensions, stroke



Multilayer Piezo Rectangular Actuators/ HMJ200 series( piezo stack actuators in an extensive array of dimensions, stroke





Dimensions Nominal displacement Blocking force Stiffness Electrical capacitance Resonance Frequency
OD/ID/H [µm@250V] [N@250V] [N/µm] [µF] [kHz]
[mm] ±10%     ±20% ±20%
HMH2501203201 Φ12/Φ3/20 20 3500 175 4.6 75
HMH2502515301 Φ25/Φ15/30 30 9000 300 13.5 50

* Customize on request.


Key Technical Index Unit Value
Relative dielectric constant εr3T - 3500±20%
Electromechanical coupling factor Kp - 70%
Longitudinal piezoelectric strain coefficient d33 10-12C/N ≥650
Piezoelectric voltage constant g33 10-3Vm/N 17
Elastic flexible coefficient S11E 10-12m2/N 14.3
Elastic flexible coefficient S33E 10-12m2/N 18.5
Dielectric loss tgδ 10-3 ≤1.5
M quality factor Qm - 45
Curie temperature TC 240
Density ρ g/cm3 7.9






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